Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
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Characteristics and Applications of Diamond Like Carbon (DLC) Films
Koji MIYAKE
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2017 Volume 60 Issue 11 Pages 428-436

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Abstract
 Diamond Like Carbon (DLC) films have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies.
 In this paper, we describe their deposition processes, film structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.
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© 2017 The Vacuum Society of Japan
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