Synthesis of Graphene by Magnetron-Plasma-Enhanced Chemical Vapor Deposition on Different Substrate Materials

Abstract

　Graphene was synthesized by radio-frequency magnetron-plasma-enhanced chemical vapor deposition on Si and SiO₂ substrates along with on Cu substrate. Although the incubation period was longer and the nucleation density was smaller than the growth on Cu substrate, graphene was grown on Si and SiO₂ substrates. It was speculated that the incubation period and nucleation density depend on the density of carbon precursor on substrate that is affected by the desorption speed of carbon or hydrocarbon.