Fabrication of an electrospray ion source with high-density capillary-needle-type emitter electrodes

Abstract

An electrospray ion source using ionic liquid has been applied to microthrusters since it is easily miniaturized and suitable for space applications. However, the thrust density of the electrospray thrusters is lower than that of other microthrusters. Hence, it is necessary to increase the density of ion emitters. We have fabricated a high-density array of capillary-needle-type emitter electrodes employing a fabrication process of field emitter arrays. The number density of emitters is about 10,000 times higher than that of the conventional emitter arrays.