Evolution of target erosion during magnetron sputtering
Released on J-STAGE: November 04, 2010 |
The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'10)
30th Annual Symposium of the Surface Science Society of Japan / 51th Annual Symposium of the Vacuum Society of Japan
The Vacuum Society of Japan / The Surface Science Society of Japan
5P-045
* Mariko Ueda, Takeo Nakano, Shigeru Baba