Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2019
Session ID : 2Aa02
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Host: The Japan Society of Vacuum and Surface Science

Roles and evolution of surface and vacuum technology in the semiconductor industry
*Manabu Tsujimura
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Abstract

Expectation for Surface and Vacuum technology is discussed necessary for angstrom node device in 2030.

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© 2019 The Japan Society of Vacuum and Surface Science
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