Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2020
Session ID : 1Ca03
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Host: The Japan Society of Vacuum and Surface Science

Development of atomic-resolution holography microscope
*Hiroshi Daimon, Hiroki Momono, Hiroyuki Matsuda, Laszlo Toth, Yu Masuda, Keiko Ogai, Soichiro Takeuchi, Yusuke Hashimoto, Tomohiro Matsushita
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Abstract

We report on the "atomic-resolution holography microscope" that combines a compact DELMA, a two-dimensional analyzer with high energy-resolution, and a small electron beam column (MINI-EOC from APCO) with a scanning electron microscope function. A nano region can be confirmed with a scanning electron microscope, and the three-dimensional atomic arrangement around the isolated atom in the nano region can be directly analyzed by holography. High energy-resolution allows valence-separated holographic analysis.

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© 2020 The Japan Society of Vacuum and Surface Science
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