Research on composition and optical properties of β-FeSi₂ thin film by co-sputtering

Abstract

In this research, to achieve a high-performance wavelength selective filter applicable to infrared heaters and wavelength selective infrared sources, we investigated the relationship between composition and optical properties of β-FeSi₂ thin films. β-FeSi₂ thin films are prepared by co-sputtering with FeSi₂ and Si targets. The amount of Si added is controlled by applied power on the Si target. As a result, β-FeSi₂ thin films are successfully prepared, which perform almost zero absorptance in the infrared region.