Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2020
Session ID : 1P39
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Host: The Japan Society of Vacuum and Surface Science

Refurbish of Poschenrieder-AP
*Masahiro Taniguchi
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Abstract

Poschenrieder-atom probe, which utilizes troidal sector electrostatic lens for energy focusing and spatial focusing, was examined by using FEM method to make clear the influence of Fringe field on the aperture. The setup parameter modificaiton was suggested and practically tested by actual instruments in our laboratory.

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© 2020 The Japan Society of Vacuum and Surface Science
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