Host: The Japan Society of Vacuum and Surface Science
The surface of the polycarbonate substrate was subjected to the plasma treatment by the reverse sputtering method. The surface energy of the treated PC plates was evaluated from the measured contact angles. ATR-IR spectra were measured for observation of functional groups introduced by the plasma treatment. Also, the surface roughness was determined. It was found that the Oxygen plasma treatment generate carbonyl and carboxyl groups on the PC plates, which are reflected in smaller contact angles of the substrate. In addition, the irradiation of the oxygen plasma caused to the increasing surface roughness and the surface area on the PC plates. The result of steam test confirmed that the Shirasu thin film deposited on the surface-modified PC substrate had enough adhesion.
