Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 1Da12
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November 3, 2021
Localization of inward plasma method using parmanent magnetic lens
*Hayato NagasawaKen OgitaniReo WatanabeHiroshi Suga
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

In order to solve these problems, we focused on the magnetic field lens using a permanent magnet that generates a small and strong magnetic field. In this study, we focused on a magnetic field lens using a permanent magnet that emits a strong magnetic field in a small size to solve these problems, and fabricated a magnetic field lens by analyzing the magnetic field using the finite element method and designing the shape of steel.

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© 2021 The Japan Society of Vacuum and Surface Science
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