Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 2Ca08
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November 4, 2021
Low damage radical oxidation of gold nanoparticle plasmon
*Kazuyasu WatanabeTakeshi KitajimaToshiki Nakano
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

Plasmon, a gold nanoparticle, has been attracting attention in recent years. We have applied plasmons of gold nanoparticles to reduce damage to the plasma-irradiated surface due to ionic impact and to utilize it for the formation of high-quality ultrathin films. This time, we investigated the effect of silicon on radical oxidation at room temperature.

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© 2021 The Japan Society of Vacuum and Surface Science
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