Host: The Japan Society of Vacuum and Surface Science
In X-ray photoelectron spectroscopy (XPS), even if the same single-phase compound sample is measured, the shape of the observed spectrum differs depending on the measurement device and experimental conditions. Therefore, in identifying unknown samples by XPS, the method of referring to the observed spectra of single-phase compounds in the XPS database obtained by different instruments depends on the operator. In this study, we developed a method for estimating the common peak structure from a large number of observation spectra that are fluctuated by measurement, eliminating the fluctuation.
