Host: The Japan Society of Vacuum and Surface Science
Optimized mechanical grinding (OMG) was developed as a low outgassing surface finishing for aluminum alloys (A5052). Surface morphology and depth profile for aluminum alloys with four types of surface finishes, i.e. conventional mechanical grinding (MG), mechanical grinding with optimized process (OMG), and combination of each grinding and chemical polishing (MG+CP and OMG+CP), were investigated using atomic force microscopy and X-ray photoelectron spectroscopy. The depth profile of the MG showed a gradual increase in aluminum (Al) concentration and a gradual decrease in oxygen (O) concentration. But in the depth profiles of MG+CP, OMG, and OMG+CP, the precipitous increasing of the Al concentration and the precipitous decreasing of the O concentration appeared. Also, approximately 5% of carbon (C) remained to a depth of 100 nm in the MG. On the other hand, C concentration of MG+CP, OMG, and OMG+CP was 0% at depth more than 10 nm. Therefore, the surface layer of the OMG and chemical polishing aluminum alloy surface finished samples were found to have a thin oxide layer of approximately 10 nm without processing alteration, and low outgassing rate.
