Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 2P08S
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November 4, 2021
Thermal effects for surface chemical state of PTFE irradiated by N+ ion beam
*Yoshitaka Nakayama, Takano Ichiro
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

PTFE is attracting attention as a high-frequency printed circuit board because of its stable electrical properties due to the strong bonding between F and C atoms. However, in order to be used as a printed circuit board, it is necessary to attach wiring materials, and the difficulty of material adhesion on PTFE is a problem. In this study, the PTFE surface was modified by low-angle N+ ion beam irradiation. The effect of irradiation heating on the surface chemical state was investigated by using glass and stainless steel substrates with different thermal conductivities.

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© 2021 The Japan Society of Vacuum and Surface Science
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