Host: The Japan Society of Vacuum and Surface Science
Low energy ion gun was developed toward the evaluation of the H+ permeability of graphene. The ion beam with the kinetic energy of 20 eV showed the energy resolution of 0.5 eV after passing through the electrostatic hemispherical monochromater. The separation of H+ and H2+ ions was also achieved by the Wien-type filter. The development of the low energy ion gun is expected to reveal the mechanism of the H+ permeation of graphene.