Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 3Ca05
Conference information

November 5, 2021
Development of low energy H+ ion gun toward evaluation of H+ permeability of graphene
*Tomoo TerasawaKatsuyuki FukutaniSatoshi YasudaHidehito Asaoka
Author information
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Abstract

Low energy ion gun was developed toward the evaluation of the H+ permeability of graphene. The ion beam with the kinetic energy of 20 eV showed the energy resolution of 0.5 eV after passing through the electrostatic hemispherical monochromater. The separation of H+ and H2+ ions was also achieved by the Wien-type filter. The development of the low energy ion gun is expected to reveal the mechanism of the H+ permeation of graphene.

Content from these authors
© 2021 The Japan Society of Vacuum and Surface Science
Previous article Next article
feedback
Top