Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2021
Session ID : 3Da11
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November 5, 2021
Effect of probe's mass on dynamic spring constant of AFM force sensor
*Wataru KurahashiYoshiaki Sugimoto
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

We discussed the effect of probe's mass on the bending oscillation or length extension of the force sensor of the frequency-modulated atomic force microscope (FM-AFM). As the mass of the probe increased, the sensor’s frequency and dynamic spring constant were calculated to decrease in both bending oscillation and length extension, respectively. The reduction ratio is larger for length extension, and in the case of a force sensor that uses length extension such as a length-extension resonator (LER), it is necessary to obtain the atomic force using a model that takes into account the mass of the probe.

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© 2021 The Japan Society of Vacuum and Surface Science
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