Host: The Japan Society of Vacuum and Surface Science
Determination of Mn valence in oxide-substances is quite difficult by conventional methods, i.e. X-ray photoelectron spectroscopy (XPS), X-ray fluorescence (XRF) analysis, etc. Even more difficult that should be for slightly Mn-doped system. We propose that secondary ion mass spectrometry (SIMS) is suitable for determining valence of dilute Mn ion in oxides. In this report, we show an approach to determine Mn valence in BaTiO3:Mn (less than 1 at.%) from a mass spectrum pattern which consists of several MnOx signals, compared with those of the standard samples, LaMn3+O3 and SrMn4+O3.
