日本表面真空学会学術講演会要旨集
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2023
セッションID: 2P07
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November 1, 2023
Development of measurement techniques at hard X-ray photoelectron spectroscopy in BL46XU at SPring-8
Satoshi YasunoYasumasa TakagiAkira YasuiOkkyun SeoTaito OsakaMichihiro SugaharaYasunori SenbaHiroshi YamazakiTakahisa KoyamaSatsuki ShimizuTakamitsu SaitoHaruhiko OhashiNaomi KawamuraKyo NakajimaKoji MotomuraMasugu SatoYusuke TamenoriMakina Yabashi
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Hard X-ray photoelectron spectroscopy (HAXPES) has been attracting considerable attention since it can probe the chemical and electronic states of the bulk and buried interface lying at depths of several tens nm due to its large probing depth [1]. In the last decade, HAXPES has been applied to various research fields [2,3]. The utilization of HAXPES measurements has expended in the several beamlines at SPring-8. This spring, SPring-8 BL46XU has been upgraded by renewing its optics and instrumentation, resulting in a significant performance improvement. This beamline is available to users from July 2023 as the second dedicated HAXPES beamline "HAXPES II” at SPring-8 following BL09XU. The beamline layout is shown in Fig.1. The features of the upgrade of BL46XU are as follows.

· A high-throughput HAXPES system specialized for automated measurements was installed in the upstream experimental hutch(EH) 1, and an atmospheric pressure HAXPES system that enables measurements under a gas atmosphere was installed in the downstream EH 2.

· Two types of double channel-cut monochromators (Si220 and Si311) were installed into the optics hutch, allowing the user to select the optimum excitation X-ray conditions (energy, resolution, and flux) according to experimental purpose.

· Wolter focusing mirrors were installed at the front of the HAXPES apparatus in both EHs 1 and 2, enabling the use of high-flux and highly stable X-rays.

This upgrade will enable users to use the appropriate instruments in different ways according to the measurement target and analysis purpose, which lead to further achievements and improved convenience for users in the future. In this presentation, we introduce the beamline specifications obtained through the commissioning and the latest measurement results using the upgraded HAXPES instruments.

References

[1] K. Kobayashi, Nucl. Instrum. Methods Phys. Res. A. 601, 32 (2009).

[2] K. Kobayashi, M. Yabashi, Y. Takata, T. Tokushima, S. Shin, K. Tamasaku, D. Miwa, T. Ishikawa, H. Nohira, T. Hattori, Y. Sugita, O. Nakatsuka, A. Sakai, and S. Zaima, Appl. Phys. Lett. 83, 1005 (2003).

[3] N. Yabuuchi, K. Shimomura, Y. Shimbe, T. Ozeki, J.Y. Son, H. Oji, Y. Katayama, T. Miura, and S. Komaba, Adv. Energy. Mater. 1, 759 (2011).

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