日本表面真空学会学術講演会要旨集
Online ISSN : 2434-8589
Annual Meeting of the Japan Society of Vacuum and Surface Science 2024
セッションID: 3F13
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October 22, 2024
Nanoscale dynamics of metal–insulator transition in VO2 thin film by IR s-SNOM
Kyungmin KimLinfeng HouJun NishidaTakashi KumagaiMasayuki Abe
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Vanadium dioxide (VO2) thin films exhibit a metal–insulator transition (MIT) with a change in resistance of three orders of magnitude nearby room temperature (~340 K). The resistive transition in VO2 is accompanied by a structural change from a low-temperature semiconducting monoclinic phase to a high-temperature metallic tetragonal rutile phase. Still, there is ongoing debate about the MIT's initial process and mechanism, with in-depth research employing surface scientific methods like C-AFM and Raman spectroscopy.

In this study, we grew VO2 thin films on TiO2(110) substrates with step and terrace structures to investigate their crystallinity and MIT dynamics in real space, by using X-Ray Diffraction (XRD) and Infrared Scanning Near-field Optical Microscopy (IR-SNOM) with Atomic Force Microscopy(AFM) simultaneously. VO2 thin films were grown by pulsed laser deposition under the substrate temperature, the laser frequency, and the partial oxygen pressure of 723 K, 2 Hz, and 0.95 Pa, respectively. The crystallinity was characterized using temperature-dependent XRD while heating and cooling the sample between 60 ℃ ~ 120 ℃.

As a result, a noticeable shift in the VO2(220) diffraction peak was observed (Fig.1(a)), which is attributed to the structural transition from the insulating M1 phase at lower temperatures to the metallic R phase at higher temperatures. Regarding the AFM/IR-SNOM measurements, we succeeded to visualize the dynamics of the VO2 metal-insulator transition in real space (Fig.1(b)). During the presentation, we will delve into the process of MIT on the surface, by focusing on series of temperature-dependent IR-SNOM images, coupled with pertinent morphological information obtained through tapping-mode AFM.

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