2016 Volume 51 Issue 2 Pages 102-107
A high resolution cathodoluminescence(CL) system for a scanning transmission electron microscope (STEM) has been developed, which has a high spatial resolution with a probe size of 1 nm and realizes angle-resolved capability. Angle resolved measurement of light emission from a sample in the STEM can be carried out by combining a parabolic mirror and position controlled pinhole. In addition, quantitative measurement of the CL intensity and CL spectrum becomes possible. This system enables various detection modes, i.e., (1) angle resolved spectral (ARS) pattern, (2) beam scan spectral (BSS) image and (3) photon map. In this article, some examples of the applications of the STEM-CL system to plasmonics are presented to demonstrate the unique measurement features of the CL system.
