Wonder in SEM Image—Low Energy Electrons and Specimen Charging

Abstract

Scanning Electron Microscope (SEM) can show us various images reflecting not only the morphology but also their electrical character etc. We can choose the most suitable images among such various images according to the purpose. It is, however, necessary to clarify the origin or hindered physics beyond these images. We discuss the physics of scanning electron microscopy by clarifying the paradox of conflicting SEM images.