Automation of Electron Microscope Sample Preparation

Abstract

In the field of electron microscopy, automation has gained attention, emerging as a key topic in conferences. Automation levels vary by context. The paper categorizes required automation styles in semiconductor fabrication lines, academia, and analysis centers. After that, it focuses on high level automation of TEM analysis in semiconductor fabrication lines. This automation requires high success rates using AI-based high robustness solutions. Workflow-wise, managing sample flow and data with high traceability is essential. It includes standardizing Lamella Carrier (LC) and LC Container (LCC) with unique ID codes of SEMI standards.