2023 Volume 58 Issue 3 Pages 111-116
Convergent-beam electron diffraction (CBED) using nanoelectron probes is used for symmetry determination of local areas and quantitative crystal structure analysis (QCBED) based on the dynamical diffraction theory. The development of fast and sensitive two-dimensional pixelated electron detectors has led to the rapid development of 4D-STEM, which combines the CBED method with scanning transmission electron microscopy, allowing the analysis of non-uniform structures such as interfaces. Structural analyses of twin boundaries of CaTiO3 and BaTiO3 using 4D-STEM and an approach of dynamical diffraction calculations toward quantitative structural analysis using 4D-STEM are presented.
