超精密光学平面の平面度の測定

抄録

Two types of testing methods of accurate optical flats are proposed and experimentally examined. They are developed in connection with the Fabry-Perot etalon which is used as the monochrometer in Brillouin scattering experiment. The parallelism and the relative flatness of an etalon are defined so that they are independent quantlties each other. The first method proposed is the photographic testing one with a multilens and it is shown that this system can determine the relative flatness to an accuracy of aboutλ/1000. The second is the pressure scanning and photoelectric detection method with a multilens and it is shown that the accuracy obtained by this system is higher than the accuracy obtained by the photographic method.