高速フーリエ変換法による立体計測と干渉計測

抄録

A computer-based method of fringe pattern analysis is proposed with applications to topometry and interferometry. The method uses a noncontour-type fringe pattern which is processed in Fourier-spectrum domain to extract the necessary phase information separately from other unwanted amplitude variations. The method has advantages over the conventional contour-fringe methods in both accuracy and sensitivity, as well as in its capability of automatic distinction between elevation and depression of the object-or wavefront form.