抄録
We study various types of 2D and 3D Si-based photonic crystal structures that are promising for future photonic integrated circuit application. Concerning 2D SOI photonic crystal slabs, we confirm the formation of a wide photonic bandgap in optical communication wavelengths, and realized efficient single-mode line-defect waveguides by structural tuning. Concerning 3D photonic crystals, we use a combination of the lithography technique and autocloning deposition method to realize complicated 3D structures. By using this strategy, we fabricate 3D full gap photonic crystals and 3D/2D hybrid photonic crystals.
