パルスパワー装置出力の短パルス化によるKrFエキシマレーザーの総合効率改善

抄録

We did experiments and consideration of the relation between the pulse width of the pulsed-power supply output and KrF excimer laser efficiency. The breakdown voltage rises when the pulse width is decreased and as a result, the laser oscillation efficiency is improved. On the other hand, the efficiency of the pulsed-power supply with the magnetic pulse compression circuit decreases because of an increase of the core volume and the compression stage number to achieve the short pulse output. To evaluate total efficiency of KrF excimer laser, we considered both the pulsed-power supply efficiency and the laser oscillation efficiency. As a result, we have arrived at the conclusion that there is a limit to improve the total efficiency by short pulse of the pulsed-power supply output. The pulse width limit is 70 to 100 nsec in our KrF excimer laser.