レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
YAGレーザー光ガイド用反射防止膜のレーザー損傷
石田 智彦山岸 敏志神村 共住吉田 國雄
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2005 年 33 巻 10 号 p. 676-680

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Antireflection (AR) coating with high damage resistance for optical guides of high power YAG laser was developed. We have indicated that each single layer films must be improved AR coating with high damage threshold. An optimum deposition of the Si02 film and Ta2O5 films that compose the AR coating was studied by the Taguchi method. Reflectance and laser-induced damage threshold of AR coating was less than 0.2% and 15.9 J/cm2, respectively at 1064 nm. The AR coating irradiated by cw YAG laser of 3-kW class was durable for 5 minutes.
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