A Tunable Device Using Sub-Wavelength Period Grating

Abstract

Optical devices using sub-wavelength period gratings were designed and fabricated by micromachining. The gratings were patterned by electron beam lithography. Using a guided mode resonant grating of solid dye polymer film, a surface emitting micro-laser was demonstrated. Based on those results, a self-sustained guided mode resonant grating was proposed for a tunable optical filter/amplifier. Combining the grating with a comb micro-actuator, the period of the grating varied by 15%. The optical properties of the tunable grating were measured.