2005 Volume 33 Issue 11 Pages 772-776
In this paper, a new hybrid technique for estimation of irradiation parameters is proposed. Micromachining of silicon using the fourth-harmonic wavelength (λ=266nm, τ=6ns) of a pulsed Nd: YAG laser beam is investigated. The silicon workpiece is irradiated while under flowing water. Based on their conditions such as the pulse energy, the focal point and the number of irradiated shots, the ablated shape and dimensions of the resulting holes are considered. First, an estimated model of the resulting shapes with the irradiation parameters are constructed by neural network. The relationship between the irradiation parameters and the resulting shapes becomes clear by using the neural network model. Furthermore, a hybrid method of a genetic algorithm and neural network to estimate the irradiation parameters for realization of any required shape is possible.
