The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
A New Design for Improving Stability of Electrostatic Vertical Comb Mirrors and Its Application to Fiber Optic Variable Attenuators
Hiroshi OBI, Toshio YAMANOI, Hiroyuki FUJITA, Hiroshi TOSHIYOSHI
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Keywords: Vertical comb, Off-centered vertical comb-drive actuator, Inter-comb gap, Stability, Pull-in
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2005 Volume 33 Issue 11 Pages 766-771

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Abstract

A new design of vertical-comb (VC) actuators has been developed to suppress in-plane electrostatic pull-in motion. VC with off-centered electrostatic combs has been found to expand the stable range in the tilt-voltag ecurves; the effectiveness has been examined by numerical simulation using ARCHITECT ®. We also have designed a fiber optic variable attenuator and experimentally confirmed the use of off-centered vertical combdrive actuator.

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© by The Laser Society of Japan
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