抄録
Multi-point simultaneous laser micro-fabrication is effective to reduce cost, and to control thermal deformation, etc. However, when the focal spot size becomes less than 10 microns in the diameter, the feasibility of multi-point simultaneous laser micro-fabrication is drastically reduced. We attempted to solve this problem by using a beam axially condensed. Four axially condensed beams were generated simultaneously using an axicon array. Even if the work distance changed within the range of mm, these beams evenly allowed us to drill penetration holes of sub-10 microns in the diameter into stainless-steel foil. A penetration hole drilled into stainless steel foil 20 microns thick can maintain the shape if the drill interval is longer than 20 microns.
