The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Ultrashort Pulse Laser Ablation for Surface Elemental Analysis
Alexandre SEMEROKPatrick MAUCHIEN
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2005 Volume 33 Issue 8 Pages 530-536

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Abstract
Laser microablation processes of solid materials (metals, alloys, dielectrics) were studied for their application to surface elemental analysis. The features of laser plasmas and craters produced by femtosecond and picosecond lasers are presented. The application of laser ablation to surface microanalysis in combination with optical emission spectroscopy (LA-OES) is discussed. The methods to control laser ablation for more efficient elemental analysis and the applications to surface characterisation with submicrometric and nanometric resolutions are proposed.
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© by The Laser Society of Japan
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