産業用途向け高出力・高繰り返し波長変換LD-YAGレーザー

抄録

We report on the recent developments of laser-diode pumped frequency conversion solid-state lasers in our section. A 150W TEM₀₀ mode, linearly polarized 1064nm beam was generated with a MOPA system. The system was applied for high-power frequency conversion. 30W 355nm and 5.6W 213nm output power was generated at a repetition rate of more than 10kHz. Frequency-tripling-efficiency of CBO (CsB₃O₅) crystal was compared with LBO (LiB₃O₅) crystal experimentally. We also introduce an industrial 200W 532nm laser, developed for TFT annealing process.