抄録
Properties of extreme ultraviolet (EUV) emission from laser generated Tin plasma were very thoroughly studied to provide experimental database for theoretical modeling and benchmarking of radiation hydrodynamic code dedicated for the EUV source research. EUV emission spectra and conversion efficiencies, defined as fraction of drive laser energy allotted for EUV ligh involved in a 2% bandwidth at 13.5nm in wavelength (i. e., inband-component) were quantitatively investigated given as a function of laser intensity, laser wavelength, target densities, and target shapes. A minimum mass target, involving a least number but sufficiently enough Tin-atoms to generate EUV light, is suggested to mitigate debris from the EUV source. A technical guideline to diminish kinetic energy of ion debris and the out-of band emission is also discussed.
