Abstract
ebris characteristics and theireduction have been investigated for a laser-produced plasma extreme ultraviolet source by using a colloidal jet/droplet target containing tin dioxide nanoparticles. The amount of deposited debris on a silicon witness plate was determined by totalaser energy irradiated onto the target. Double laser pulse irradiation was not effective for deposited debris reduction. Incontrast, in situ low-temperature heating of the witness plate was effective inreducing the amount of deposited debris. Room-temperature photon processing using an incoherent vacuum ultraviolet excimer lamp at 126 nm deoxidized a deposited tin oxide layer
