The Review of Laser Engineering
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
New Technique for Producing Uniform Tin Droplet and Droplet Target Alignment
Etsuo FUJIWARA
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Keywords: Droplet, Sn, EUV
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2008 Volume 36 Issue 11 Pages 731-735

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Abstract
A novel droplet generator equipped with flow-control has been developed for the formation of molten tin droplets. The piston with a piezoelectric crystal enables us to change the flow resistance in a narrow gap region between a liquid vessel and a nozzle, resulting in the variation of the flow velocity at a high repetition rate. The formation of tin droplets using this generator was demonstrated in a wide frequency region from 16 to 59 k Hz using a 50μm nozzle, which lies with the range of 3.9<λId<14. The separation of the piezoelectric crystal and the nozzle in this droplet generator is quite suitable for high-temperature liquids such as molten tin and for harsh environments such as those in vacuum. A flight control of water droplets was also demonstrated by electrifying the droplets.
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© by The Laser Society of Japan
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