Nano-processing Utilizing Plasmon on Glass Surface by Femtosecond Laser Pulse with Template of Dielectric Particle Array

Abstract

Nano-processing using a near-field generated by laser irradiation onto the nano-particle is becoming a new emerging nanofabrication technology, because it can fabricate nano-sale structures even with near-infrared laser. Nano-scale area near the contact point with the dielectric particle on the material surface can be ablated by lens effects and/or Mie scattering depending on the particle size. We report on new phenomena, leading to a new nano-processing technique via surface plasmons, even by the use of dielectric particles.