レーザー研究
Online ISSN : 1349-6603
Print ISSN : 0387-0200
ISSN-L : 0387-0200
Laser Processing
Nano-processing Utilizing Plasmon on Glass Surface by Femtosecond Laser Pulse with Template of Dielectric Particle Array
Tetsuo SAKAIYuji NISHIZAWATomoya MIYANISHIMinoru OBARA
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ジャーナル フリー

2008 年 36 巻 APLS 号 p. 1214-1217

詳細
抄録
Nano-processing using a near-field generated by laser irradiation onto the nano-particle is becoming a new emerging nanofabrication technology, because it can fabricate nano-sale structures even with near-infrared laser. Nano-scale area near the contact point with the dielectric particle on the material surface can be ablated by lens effects and/or Mie scattering depending on the particle size. We report on new phenomena, leading to a new nano-processing technique via surface plasmons, even by the use of dielectric particles.
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© Laser Society of Japan
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