抄録
Laser direct machining has much attractive potential beyond traditional mechanical machining. We have
been developing a micro-pattern fabrication system using an ultra-short pulse laser and are adapting this
it to a large area with our high precision mechanical system. Our system is composed of a 1-axis highly
accurate laser scan unit, a high precision positioning XY table, and a laser-machine synchronized
controller. We realized a scanning system in a 120-mm scanning line, where the laser-focused points
line up within error of 2-μm. In our spherical, 50-μm diameter, 25-μm deep sample, we realized formerror
under ± 2-μm. With a high-speed scanning system, about 240-ms is required to make one shape.
This means it takes a month to process a A4 size mold. Therefore, our next development target is a
process that is five times faster.
