抄録
Line-shaped femtosecond pulse is well suitable for large-area machining that requires a high-speed
fabrication, for example, laser cutting, peeling and grooving. In this study, we demonstrate a shingleshot
fabrication of three-dimensional line structure inside a glass, a laser peeling of indium tin oxide fi lm
and a laser grooving of stainless with the line-shaped pulses by a diffractive cylindrical lens on a spatial
light modulator.
