抄録
A new optical profi lometer using an ultra-stable mode-locked frequency comb femtosecond laser and a
single pixel camera is described. The ultra-stabilized frequency comb was used to measure an object
with a large depth, wide dynamic range without 2π phase ambiguity. The single pixel camera was used
to obtain the object profi le information without a mechanical scanning. A two-dimensional sampling
method with one-half of the sampling points was proposed. It was peformed with generating a reversal
signal from a subtraction of the summed signal. We demonstrated the surface profi lometry for an object
with the depth of several centimeters. The RMS error for 6 × 6 mesurment points was 8.2 μm.
