抄録
We have developed a unique Nd:YAG laser source for laser annealing, which can oscillate with variable
pulse duration. The pulse duration is electrically varied by three Pockels cells arranged in series. These
Pockels cells are synchronized with each other. With this setup, we have achieved a variable pulse
duration of 80-1300 ns by controlling the trigger timings and the applied voltages for each of the Pockels
cells. In this report, the configuration of the laser source and the Q-switch control sequence are
described. Moreover, qualitative annealing results obtained with the system are shown.
