抄録
Argon-fluoride (ArF) excimer laser operations at high repetition rates have been studied with special focus
on the distance between electrodes. We find that, for stable laser operations, the maximum repetition
rate increases with decreasing electrode separations. This is mainly caused by narrow discharge widths
and an electric field intensity distribution that concentrates on the center. For an electrode separation of
8 mm, a homogeneous discharge could be maintained for an ArF excimer laser at a maximum repetition
rate of 10 kHz. Results are discussed in detail with special focus on the influence of gas density depletion.
