抄録
Photonic integration by hybrid silicon/silica waveguide systems is attractive for realizing various optical
devices and optical integrated circuits. Silicon waveguides and silica-based waveguides have
complementary characteristics, although those waveguides can be formed on identical SOI wafers by a
CMOS compatible process. Therefore, photonic integration by a hybrid silicon/silica waveguide system
was proposed. We introduce the concept and a photonic integration method with these waveguide
systems. We also investigated both the low-loss waveguide junction and the hetero waveguide crossing
between Si-wire waveguides and silica-based waveguides. Finally, we introduce optical devices and
circuits with the hybrid silicon/silica waveguide system.
