Abstract
In order to construct low carbon society, it is necessary to develop a high performances new green device
such as a solar cell, a lithium battery, a power semiconductor, and light emitting diode (LED) lighting
and so on. Recently, flexible device using metal oxide materials and plastics have an attracted much
attention due to weight lighting and flexibility. However, their processing temperature of the oxide
materials are more than 500˚C. Therefore, it is necessary to develop the low temperature processing for
oxide thin film. For this aim, we have developed photo-induced chemical solution process such as
excimer laser-assisted metal organic deposition (ELAMOD) and photo reaction of nano-particle method
(PRNP) for the preparation of the metal oxide thin film on organic, glass and single crystalline substrates.
In this paper, we describes the formation of epitaxial and polycrystalline films and the preparation of
flexible oxide films for new devices.
