Abstract
We fabricated a high-performance flexible in-plane micro-supercapacitor (MSC) with greatly improved
energy and power densities by laser direct writing of a carbon interdigitated electrode on a polyimide
film using a 405 nm blue-violet laser. The morphologies and electrical conductivities of the carbon
layers formed on the polyimide surface were remarkably influenced by the laser powers and
atmospheres during laser irradiation. An MSC prepared by laser carbonization in an inert Ar gas
showed excellent cycling stability, good flexibility, and the capability of operating at a high energy
density, which is expected as an energy storage device for Internet of Things (IoT) technology based on
smart materials.
