抄録
Laser processing is required in an extremely short wavelength because getting high-power solid-state
lasers is difficult below a wavelength of 200 nm. In an extremely short wavelength region, the energy
from a single photon can match the bond energy levels of various carbon compounds and the band gaps
of solid materials, enabling these compounds and solids to be processed directly by one or two photons.
We developed a hybrid ArF laser, which combines a solid-state laser oscillator and an excimer laser
amplifier. We achieved high light-harvesting efficiency and high coherence of a hybrid laser, which has
an M2 value of 1.6 and an average power of 110 W with three-pass amplifications.
