抄録
Vertical-Cavity Surface-Emitting Laser (VCSEL) arrays are very promising light sources for heating,
sensor applications, and optical wireless power transmission. Arrays have hundreds of VCSELs, a few
bonding pads, and all of the VCSELs are connected to the same electrode to simultaneously emit light.
Their advantages include a higher output power than watts, a high power conversion efficiency
exceeding 40%, and so on. Recently arrays with hundreds of VCSELs that can emit light individually
are needed for such applications without mechanical devices as MEMS and polygon mirrors. But
conventional VCSEL arrays need the same number of bonding pads, gold wires, substrate wirings, and
IC driver terminals as emitters, thus taking up more space and increasing application costs. We propose
an all monolithically integrated self-scanning VCSEL array that can individually emit light, even though
it has only five bonding pads regardless of how many emitters it has.
