抄録
We report a MEMS (Micro-Electro-Mechanically-Systems) based high speed wavelength swept NIR
(Near Infrared) VCSEL (Vertical-Cavity Surface-Emitting-Laser) source operating at 1050 nm
wavelength range for the SS-OCT (swept-source optical-coherence-tomography) application. An
electrically pumped half-VCSEL with a semiconductor bottom DBR (Distributed Brag Reflector) is used
for its superior reliability and simple optical configuration as a light source. The developed tunable
VCSEL is composed of silicon on insulator; SOI-MEMS based diaphragm mirror with a high reflective
dielectric coating, and is mounted by the thermo-compression bonding of gold onto a half-VCSEL chip
with strained InGaAs multi-quantum wells gain medium. Wavelength tuning range over 88 nm is
achieved by mechanical means. This tuning range corresponds to 8.3% tuning ratio which is currently a
record for electrically pumped tunable VCSELs. We also explained its application in SS-OCT sensing.
